| ID: | 399 |
| Title: | wafer handling robot - http://www.kensingtonlabs.com |
| Description: | This report describes a simulation study characterizing the advantages and disadvantages of implementing multiple load ports on metrology equipment in a semiconductor factory. Three methods of automated material handling (AMH) for 300 mm. |
| Category: | Shopping: Consumer Electronics |
| Link Owner: | Thomas Williams |
| Date Added: | November 05, 2009 08:53:53 PM |
| Number Hits: | 0 |